Freeform Optical Surface Form Metrology with Serial Data Acquisition

Freeform optics, or optics with no axis of rotational invariance, provide optical designers more degrees of freedom, flexibility, and opportunity for innovation increasing optical performance and system integration while decreasing the form factor. Advancements in optical fabrication have enabled freeform surface manufacture with greater precision. Metrology instruments and techniques are needed to verify the performance of freeform optical surfaces and systems to keep up with design and manufacture. Freeform optics often have high slopes, no axis of symmetry, and a large departure from spherical, making traditional metrology techniques inadequate. This research was conducted to enable form measurements of freeform mirrors in the 250 mm class for a next generation three mirror anastigmatic (TMA) telescope complete with a statement of the measurement uncertainty to fill the gap in metrology of freeform optics. A flexible metrology instrument that could measure relatively large optics with customizable probe paths and sampling strategies was needed while maintaining the required precision.